| abstract |
Disclosed is a fluorine-containing polymer compound containing first and second repeating units respectively represented by formulas (a-1) and (a-2), n n n n n n n n n n wherein R 3 represents a fluorine atom or fluorine-containing alkyl group, each of W and W 1 independently represents a bivalent linking group, R 2 represents an acid-labile protecting group, each of R 4 , R 5 and R 6 independently represents a hydrogen atom, fluorine atom or monovalent organic group, and at least two of R 4 , R 5 , R 6 and W or W 1 may be combined to form a cyclic structure in formula (a-1) or (a-2). This polymer compound has a weight-average molecular weight of 1,000 to 1,000,000 and can provide a resist composition capable of forming a pattern with no swelling and no pattern falling down. |