| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fb59d807825c02345739f5369d87845c |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4407
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D11-0041
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-5018 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B3-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B3-08 |
| filingDate |
2008-06-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4b34be87af66901c015ee25d6df08df2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e436b44fd4a751ff7f7a48b60468cc87
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8eac840aeb2fc1bad2f85e15f522c74a |
| publicationDate |
2009-01-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2009020140-A1 |
| titleOfInvention |
Non-flammable solvents for semiconductor applications |
| abstract |
Methods and compositions for purging and cleaning a semiconductor fabrication system are disclosed herein. In general, the disclosed methods utilize solvents comprising hydrofluoroethers. Hydrofluoroethers are non-toxic and have low moisture content, preventing heat generation from organometallic precursor hydrolysis. In an embodiment, a method of cleaning a semiconductor fabrication system comprises dissolving at least one chemical precursor used in semiconductor fabrication in at least one delivery line with a solvent to clean the at least one delivery line. The solvent generally comprises a hydrofluoroether. The methods and compositions may be used in a variety of semiconductor film deposition processes. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10916474-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8128755-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009104100-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7976807-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019393088-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11784093-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017306273-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8158569-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10501710-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011214689-A1 |
| priorityDate |
2007-06-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |