| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4603278426b11e553ceb808c16eadf29 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2203-054 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00547
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C99-0085
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C99-009
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C3-005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C99-004 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00 |
| filingDate |
2008-01-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bf30a52c4316d354764213f8ae2ab0cc |
| publicationDate |
2008-10-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2008254570-A1 |
| titleOfInvention |
Angle control of multi-cavity molded components for mems and nems group assembly |
| abstract |
A method of making a mold includes forming spaced mold cavities in a mold body. The mold cavities include geometrically similar portions, but have respective depths below an initial reference surface that vary as a function of position along a particular direction. The mold cavities can be formed using anisotropic etching of preferred crystal directions in single crystal materials such as silicon. A portion of the mold material adjacent the initial reference surface is removed to expose a new reference surface at a tilt angle with respect to the initial reference surface. The modified mold cavities have their respective axes at a new desired tilt angle relative to the new reference surface. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2012030897-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015130044-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9277792-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8132775-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9166002-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9466541-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009266972-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8337735-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009001248-A1 |
| priorityDate |
2004-01-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |