| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_268be9afa00cf55b5aa72b1612151ecb |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F2438-03 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F212-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F12-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F2-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F8-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate |
2008-03-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1037a749a7d25144305b690cd1dbda52 |
| publicationDate |
2008-10-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2008248419-A1 |
| titleOfInvention |
Positive resist composition and pattern forming method using the same |
| abstract |
A positive resist composition, includes: (A) a resin that has a group having absorption at 248 nm at a main chain terminal of the resin (A), and a pattern forming method uses the composition. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011081612-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013122427-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10423068-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8541161-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I476515-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021040253-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8349535-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10248019-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10285593-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8642245-B2 |
| priorityDate |
2007-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |