| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_268be9afa00cf55b5aa72b1612151ecb |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-146
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-126
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-122
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-111
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C2602-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C2601-14 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C381-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C311-48
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2041 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C311-00 |
| filingDate |
2008-03-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_79a4c297fe26465f427b7bf18a643a56 |
| publicationDate |
2008-09-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2008220371-A1 |
| titleOfInvention |
Photosensitive composition, compound used for photosensitive composition and pattern-forming method using photosensitive composition |
| abstract |
A photosensitive composition comprises: (A) a compound capable of generating an acid represented by formula (I) upon irradiation with actinic ray or radiation; and (B) a resin that decomposes by the action of an acid to its increase solubility in an alkali developer n n n n n n n n n n wherein Ra represents an alkyl group substituted with a fluorine atom, or an aryl group substituted with a fluorine atom or a group having a fluorine atom; Rb represents an alkyl group not substituted with a fluorine atom on α-position of the alkyl group, or an aryl group not substituted with a fluorine atom or a group having a fluorine atom. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011212390-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010119974-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017261852-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101869104-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9012129-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8642245-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8808959-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8859181-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I503629-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I464141-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9726976-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107422601-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10656521-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102023482-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011065041-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20120120981-A |
| priorityDate |
2007-03-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |