Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9bf7ab9b076dc5d10a887213c8620fb0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947 |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-108 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-106 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0395 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
filingDate |
2007-10-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7401ee1fb62bc47c8fbb13a31a5a4d0b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6a26021bd994e9660405e117c531a78e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2d9b8b5ea21fa1faf7d74750f5f69c01 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_72da66bf0e47b0f935166fccd18f7f76 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9c81eb00fc8258d890c22c228c0630aa |
publicationDate |
2008-05-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
US-2008124651-A1 |
titleOfInvention |
Method of controlling the differential dissolution rate of photoresist compositions, polycyclic olefin polymers and monomers used for making such polymers |
abstract |
A photoresist composition encompassing a polymer having at least one polycyclic olefin repeat unit having a desired exo mole percent is provided, where the repeat unit is derived from a polycyclic olefin monomer having the desired exo mole percent. Such polymers having such repeat units having a desired exo mole percent offer control of differential dissolution rate and hence provide enhanced imaging properties. Exemplary monomers having a desired exo mole percent are also provided |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012122031-A1 |
priorityDate |
2003-02-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |