| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c16d2144a81bfa32a665dca1e93c3d37 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-112 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0395
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07H3-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03C1-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03C5-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07H3-00 |
| filingDate |
2007-09-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_edbf5c22075915ebe86d22ec326bd5d8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a0a0879f257d7458c217831b39265984
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_227c97c3e42d3ad231a07aed3cd61eac
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_15e6740c01962375ffd2523493c03d5e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_db12fbb573e89fe5be662ba404c1db0f |
| publicationDate |
2008-03-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2008070157-A1 |
| titleOfInvention |
Cyclodextrin derivative, photoresist composition including the cyclodextrin derivative and method of forming a pattern using the photoresist composition |
| abstract |
A photoresist film is formed on an object layer of a semiconductor device by coating the object layer with a photoresist composition including about 7 percent to about 14 percent by weight of a cyclodextrin derivative, about 0.1 percent to about 0.5 percent by weight of a photoacid generator, and a remainder of an organic solvent. The cyclodextrin derivative includes a β-cyclodextrin moiety and at least one alkyl carbonate group. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011177454-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113248635-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109765755-A |
| priorityDate |
2006-09-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |