| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_94244df0095114f0783da985ad28cac3 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2203-0361
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-07
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2203-0315
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2201-0338 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D5-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C28-321
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C28-322
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76873
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76879
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-423
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76855
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C28-341
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C28-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C28-3455
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C28-345
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32115
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D5-10 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D5-02 |
| filingDate |
2006-05-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c9ac759faf065ed5cb6c55317859daaa |
| publicationDate |
2008-02-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2008029400-A1 |
| titleOfInvention |
Selective electroplating onto recessed surfaces |
| abstract |
Processes for electroplating recessed features on a substrate are provided. The processes are useful in applications such as creating Cu interconnects on integrated circuits. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016086075-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8119525-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011284990-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10053790-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014251815-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2023086742-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014192483-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8764961-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009215264-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010096273-A1 |
| priorityDate |
2005-05-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |