| abstract |
The purpose is to remove surface-defective layer existing on the surface of an anode on a CCM substrate, protect the anode surface, prevent a drive voltage of an organic EL element from rising, and maintain uniformity of luminescence. On a substrate ( 12 ) a CCM layer ( 14 ) for converting light wavelength is formed. On the CCM layer ( 14 ) an anode ( 16 ) of IZO is formed. On the anode ( 16 ) a surface protective layer ( 18 ) containing an inorganic compound is formed by an inductively coupled RF plasma support magnetron sputtering. A preferable inorganic compound is SiO 2 . The surface defective layer of the anode ( 16 ) can be removed by the sputtering and the state of being removed can be held by the inorganic compound. Therefore the electrical stability of the anode ( 16 ) can be maintained for a long time, thereby improving the display quality of an organic EL display ( 100 ). |