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http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-34
filingDate 2007-06-15-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8a57b7c7e27a50f1ba55da9b2cd2f984
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publicationDate 2007-10-25-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2007246346-A1
titleOfInvention Electroformed sputtering target
abstract A sputtering target comprising an inverted annular trough encircling a central cylindrical well, and additionally comprising a plurality of electroplated layers of sputtering material is described. The sputtering material comprises at least one of aluminum, copper, tantalum, titanium and tungsten.
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