| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_38ed56a4b4e8e2315b2b3308bffedb3f |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3105
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76825
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76814
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31058
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76807 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31 |
| filingDate |
2006-04-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e58280734063e355ddbca26a38154bcd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5e701a6371e470f08800af7ec7b4073e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a225a674b36f380862085870aeeb13ff |
| publicationDate |
2007-10-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2007243720-A1 |
| titleOfInvention |
UV treatment for low-k dielectric layer in damascene structure |
| abstract |
An UV treatment for making a low-k dielectric layer having improved properties in a damascene structure. A low-k dielectric layer in a damascene structure is subjected to an UV treatment with He gas or H 2 gas to eliminate etching damage to the exposed surfaces of the low-k dielectric layer. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010096726-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012068344-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015270189-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103646914-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9564383-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8324712-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8765546-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10134632-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8809183-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8114734-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109411358-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8324048-B2 |
| priorityDate |
2006-04-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |