| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c5520dd38cc403678d9f91e0b0ee95fb |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0001
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-05024
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-05008
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-05001
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-05009
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-13024
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-0231
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-02372
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-3114
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-13025
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-051
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-02377
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-05548
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-05647
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L24-05
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L24-03
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-05022 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76898
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-14618
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L24-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-14683 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-48 |
| filingDate |
2007-04-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f7944e400d9ecb87055c3264db8efc87 |
| publicationDate |
2007-10-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2007241457-A1 |
| titleOfInvention |
Semiconductor apparatus and method of producing the same |
| abstract |
A semiconductor apparatus including: a semiconductor substrate having a through hole; an electrode pad provided on a first surface of the semiconductor substrate so as to cover the through hole; an external connection terminal provided on a second surface of the semiconductor substrate; a conductive wiring passing through the through hole and allowing conduction between the electrode pad and an external connection terminal; a first insulating film provided on the first surface of the semiconductor substrate; and a second insulating film provided on a second surface of the semiconductor substrate and on an inner surface of the through hole to insulate the semiconductor substrate from the conductive wiring; the conductive wiring being connected to the electrode pad via the connection opening formed in at least one of the first insulating film and the second insulating film that are formed in such a way that at least a part of the first insulating film and a part of the second insulating film overlap, in a direction vertical to the first surface of the semiconductor substrate, the bottom surface of the through hole, and the connection opening being formed so as to avoid a periphery of the bottom surface of the through hole. This provides a semiconductor apparatus with a highly-reliable through electrode and a method of producing the apparatus. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10580732-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10411158-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009189256-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008176035-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9865502-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014103528-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11164829-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8853547-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10043743-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8658534-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11152316-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8178977-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10566497-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012244134-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9318654-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011232946-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009211793-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7948085-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8110900-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11355669-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011147782-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9935038-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2179445-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2179445-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009309218-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/FR-2959866-A1 |
| priorityDate |
2006-04-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |