| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ed89ca88042d3b6f7afc21d7b6dd7b87 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J49-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-244
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N33-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32422
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32935 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N33-00 |
| filingDate |
2007-02-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2441165546ac4296ea61547eba42e761
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9d958d781a8c022bbe6e1191a4ab8309
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_47ab4963a1daa9f980e1d1ddc141a022
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_79f9eac47e1999034e95c73bc77b3bc7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f1891b1c3ed6b094c2da20fc336c1f13
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a384ff47427814a6f72c13277dbdc5fe |
| publicationDate |
2007-10-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2007227231-A1 |
| titleOfInvention |
Technique for Monitoring and Controlling a Plasma Process |
| abstract |
A time-of-flight ion sensor for monitoring ion species in a plasma includes a housing. A drift tube is positioned in the housing. An extractor electrode is positioned in the housing at a first end of the drift tube so as to attract ions from the plasma. A plurality of electrodes is positioned at a first end of the drift tube proximate to the extractor electrode. The plurality of electrodes is biased so as to cause at least a portion of the attracted ions to enter the drift tube and to drift towards a second end of the drift tube. An ion detector is positioned proximate to the second end of the drift tube. The ion detector detects arrival times associated with the at least the portion of the attracted ions. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7453059-B2
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009200461-A1
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010022076-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019057847-A1
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8926850-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009017229-A1
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017076920-A1
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10748748-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010019141-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7586100-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7476849-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7888636-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014299577-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015187544-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009001890-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009104761-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009104719-A1 |
| priorityDate |
2006-03-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |