| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8cf8d77ac0eff1767b22d2fb9445b64d |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H2001-4682
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H2242-26 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03J7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32146
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32183
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32926 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03J7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46 |
| filingDate |
2018-10-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2020-08-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d72a67099ac366f346c6c867d5f3982c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_603e5f061a3c31257fcfc70e37ed41d4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b8b6f82e1298e776bdf7084216e82c38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ffd22b8af4aecabc91272f3586193a99 |
| publicationDate |
2020-08-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-10748748-B2 |
| titleOfInvention |
RF impedance model based fault detection |
| abstract |
A method to detect a potential fault in a plasma system is described. The method includes accessing a model of one or more parts of the plasma system. The method further includes receiving data regarding a supply of RF power to a plasma chamber. The RF power is supplied using a configuration that includes one or more states. The method also includes using the data to produce model data at an output of the model. The method includes examining the model data. The examination is of one or more variables that characterize performance of a plasma process of the plasma system. The method includes identifying the fault for the one or more variables. The method further includes determining that the fault has occurred for a pre-determined period of time such that the fault is identified as an event. The method includes classifying the event. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11056316-B2 |
| priorityDate |
2012-02-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |