| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_dfbfbd26409fa3b6b0ba616257690419 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-15
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B41-009
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-4807
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-581
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B41-5031
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B41-87 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-15
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B41-87
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-581
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B41-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B65D85-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-48 |
| filingDate |
2005-01-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_63eef97d2e76b5869d0d1b6bc82e3228
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_79ee353d23b676abf05041c95d9979ef
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_17ab27d6737ad476698dfb0e1e53813b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8adbe39e55444624e377086579cd80fb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e8b1d345e50d187635358972de5fc437 |
| publicationDate |
2007-07-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2007161494-A1 |
| titleOfInvention |
Non-oxide ceramic having oxide layer on the surface thereof, method for production thereof and use thereof |
| abstract |
A non-oxide ceramics having improved performances and functions by forming a high-quality oxide film on the surface of a non-oxide ceramics such as aluminum nitride. The method for the formation of the non-oxide ceramics comprises the steps of: (1) providing a non-oxide ceramics; (2) introducing the non-oxide ceramics into a furnace and then regulating the atmosphere within the furnace so as to have an oxidizing gas content of not more than 0.5 mmol in terms of total number of moles of the oxidizing gas per m3 of the inside of the furnace; (3) heating the non-oxide ceramics to a temperature at or above a temperature, which is 300° C. below the oxidation start temperature of the non-oxide ceramics, while maintaining the low-oxidizing gas atmosphere and (4) bringing the non-oxide ceramics heated in the step (3) into contact with an oxidizing gas and then holding the non-oxide ceramics at a temperature above the oxidation start temperature of the non-oxide ceramics to form an oxide layer, and that, in the step (4), until at least two min. elapses after the arrival of the temperature at or above the oxidation start temperature after the start of the contact between the non-oxide ceramics and the oxidizing gas, the pressure or partial pressure of the oxidizing gas is maintained at not more than 50 kPa. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008269040-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018142338-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9018077-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9589801-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11131014-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9418963-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7851365-B1 |
| priorityDate |
2004-01-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |