| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0d02b0cef74cdded5369b8e0f85e3560 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-14687
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-14685
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-14632
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-14627 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00 |
| filingDate |
2006-12-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cd38268269a633a7f449ca9919cdcc64 |
| publicationDate |
2007-07-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2007161146-A1 |
| titleOfInvention |
Method for Manufacturing Image Sensor |
| abstract |
A method of manufacturing an image sensor using a microlens mold is provided. The method includes: forming an interlayer dielectric layer on a semiconductor substrate having photodiodes; forming color filter layers on the interlayer dielectric layer; forming a planarization layer on the color filter layers; coating photoresist on the planarization layer; aligning a mold having a lens shaped pattern on the semiconductor substrate with the photoresist applied thereon; pressing the mold and the semiconductor substrate closely to each other such that a pattern formed in the mold is transferred onto the photoresist; and separating the mold from the semiconductor substrate, thereby forming micro-lenses. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008079042-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7563626-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011032398-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9236268-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008157154-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015111393-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7879640-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8330840-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/FR-2935070-A1 |
| priorityDate |
2005-12-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |