| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2a819eda0adf22936a52362eeebb9fb4 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C59-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08J7-123
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-0026
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y30-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-0665
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-0673 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-22 |
| filingDate |
2006-11-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_60b6739a4324a1486d13473aa647b9b6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_54905aa3f9c6a3b606f15eaccf698e74 |
| publicationDate |
2007-05-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2007114124-A1 |
| titleOfInvention |
Charge-free low-temperature method of forming thin film-based nanoscale materials and structures on a substrate |
| abstract |
A method of forming a nanostructure at low temperatures. A substrate that is reactive with one of atomic oxygen and nitrogen is provided. A flux of neutral atoms of at least one of nitrogen and oxygen is generated within a laser-sustained-discharge plasma source and a collimated beam of energetic neutral atoms and molecules is directed from the plasma source onto a surface of the substrate to form the nanostructure. The energetic neutral atoms and molecules in the plasma have an average kinetic energy in a range from about 1 eV to about 5 eV. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9275859-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014510414-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7601430-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2690651-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015220443-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104498883-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103460341-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014017827-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009214859-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2690651-A4 |
| priorityDate |
2005-11-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |