| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_55772a624ed0dc9f51ccf19131db642c |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-3414 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-00 |
| filingDate |
2006-09-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_685c6a1692291fdfcfda12132a564fa5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_29cf277545729b49acbc44357fa3c1e5 |
| publicationDate |
2007-04-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2007074970-A1 |
| titleOfInvention |
Device and method of manufacturing sputtering targets |
| abstract |
The present invention comprises an apparatus for manufacturing a sputtering target that has a crucible for holding a liquid material. The crucible has a discharge opening. A positioning mechanism is mounted adjacent the crucible. A substrate is held by the positioning mechanism. The positioning mechanism moves the substrate such that the material is deposited onto the substrate. A method of manufacturing a sputtering target is also disclosed. The method includes melting an material and discharging the material through a nozzle. A substrate is moved adjacent the nozzle such that the material is deposited onto the substrate. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10211351-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7935558-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9091379-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8048707-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8338214-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10043921-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011067998-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012094429-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110392639-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9169548-B1 |
| priorityDate |
2005-09-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |