| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_754d7b133ea143b8c946b81e376487ac |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B22D27-045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C22C38-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-3414
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C22C19-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C22C27-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C22C27-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-00 |
| filingDate |
2006-08-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6183d63931973196cb8c6db27f533750
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0e4085e6995dac9a589a9369273ce13e |
| publicationDate |
2007-03-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2007051623-A1 |
| titleOfInvention |
Method of making sputtering target and target |
| abstract |
Method of making a sputtering target wherein the number of processing steps is reduced by providing melted sputtering target material in a heated mold and solidifying the melted material in the mold using a unidirectional heat removal process to produce a sputtering target with a selective grain orientation. The method can produce a solidified sputtering target having a selectively oriented multigrain microstructure or a selectively oriented single crystal microstructure suited or tailored to the sputtering process to be subsequently employed using the target. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013062032-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013020617-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007074970-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008289958-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8551193-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2008134516-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007062803-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007062804-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2008134516-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9279178-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9070664-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014001039-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008105542-A1 |
| priorityDate |
2005-09-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |