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publicationDate 2007-02-15-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2007034909-A1
titleOfInvention Nanometer-scale semiconductor devices and method of making
abstract A semiconductor device including a substrate having a dopant of a first polarity, a first semiconducting structure including a dopant of a second polarity disposed over the substrate, and having substantially planar top and side surfaces. The semiconductor device includes a first junction, formed between the first semiconducting structure and the substrate, having an area wherein at least one lateral dimension is less than about 75 nanometers.
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