| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_00a1a01f77b1f85dddbe456a5efdc288 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-428
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-2991
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-401
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-77
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-402 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-6455
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-3414
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-34 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-00 |
| filingDate |
2005-08-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_79abc76e8730d139caeacca20175cd0a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f5f7efb85b0911e5df78fdb389b9f582 |
| publicationDate |
2007-02-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2007034500-A1 |
| titleOfInvention |
SiOx:Si sputtering targets and method of making and using such targets |
| abstract |
Silicon oxide and electrically conductive doped silicon materials are joined in a protective environment to yield a composite SiO<SUB>x</SUB>:Si material that exhibits the properties of SiO<SUB>x</SUB>, and yet is electrically conductive due to the presence of the Si. Such a composite material finds use as a target for DC and/or AC sputtering processes to produce silicon oxide thin films for touch-screen applications, barrier thin films in LCD displays and optical thin films used in a wide variety of applications. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7658822-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007034837-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007037404-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7790060-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7749406-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/BE-1028481-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2017140647-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10815143-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/BE-1028482-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10777744-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022013285-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022013284-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3208856-A1 |
| priorityDate |
2005-08-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |