| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f50f95c17e4934fb9f9810574cdf87aa |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68735 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4582
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32082
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4585
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-5096 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-687 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-509
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-458
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J19-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 |
| filingDate |
2006-10-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_99300497694fa58df656c09dbd4a3f7a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b7bc7daaf15b9f8e6fcaac539e3747d8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fc3e645f36c833cde4582cbb765e171b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_71b27cb90f7c7ad88b2063dca571646d |
| publicationDate |
2007-02-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2007032048-A1 |
| titleOfInvention |
Method for depositing thin film by controlling effective distance between showerhead and susceptor |
| abstract |
A method for depositing a thin film on a substrate by plasma CVD includes: providing a vacuum chamber including a showerhead and a susceptor entirely facing the showerhead in parallel, placing a substrate on the susceptor entirely within the inner portion; and applying an RF power between the showerhead and the susceptor to deposit a thin film on the substrate. The susceptor includes an inner portion and a peripheral portion that is defined as any portion enclosing the inner portion and defines an electrically effective distance from the showerhead greater than that defined by the inner portion. |
| priorityDate |
2002-04-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |