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publicationDate 2007-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2007023976-A1
titleOfInvention Imprint lithography
abstract A lithographic apparatus is disclosed that has an imprint template and a substrate table configured to hold a substrate, the imprint template having a patterned surface, a layer of heat absorbing material provided on the patterned surface of the imprint template.
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