| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_97411dac2a9aceddcf1140e97aad0a57 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D7-123
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D5-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D21-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D17-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D17-001
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D17-002 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D5-02 |
| filingDate |
2006-04-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f4a7ce027dd6121172acb42d5eb27bfa
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3ca84aa8d0fce04cd118f99a4fe85663
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ed24541dfde272f1348188bf958ae725
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ec42d28710bf814854f5e5ef5e8ec5e9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dbf0d72b50927f4cbf772549cd3fbaf5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f3670d9d17352f95464163999fff0310 |
| publicationDate |
2006-10-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2006237323-A1 |
| titleOfInvention |
Electrolytic process using cation permeable barrier |
| abstract |
Processes and systems for electrolytically processing a microfeature workpiece with a first processing fluid and an anode are described. Microfeature workpieces are electrolytically processed using a first processing fluid, an anode, a second processing fluid, and a cation permeable barrier layer. The cation permeable barrier layer separates the first processing fluid from the second processing fluid while allowing certain cationic species to transfer between the two fluids. The described processes produce deposits over repeated plating cycles that exhibit deposit properties (e.g., resistivity) within desired ranges. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9303329-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9005409-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9017528-B2 |
| priorityDate |
1999-04-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |