| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0c7d57fb64d62f9df34d156b8ddb2165
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_88751204e1b42e2e2841bed4ccd1d7db
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1880dcb164277a68243e80cdf7288cd0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_34e0d903d44613b25cf2f2f0951233a3 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31053
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-044
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24D3-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 |
| filingDate |
2005-09-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2353fd1e7f283e768cd5ec0703ed08f2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3d0535df451840aca77ebb121ca1a5d7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8204fe60ad78e2642c884347b5203ddc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5508947fafc8c112b691615642aa1af6 |
| publicationDate |
2006-07-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2006162261-A1 |
| titleOfInvention |
Composition and associated method for catalyzing removal rates of dielectric films during chemical mechanical planarization |
| abstract |
A low solids-content slurry for polishing (e.g., chemical mechanical planarization) of substrates comprising a dielectric and an associated method using the slurry are described. The slurry and associated method afford high removal rates of dielectric during polishing even though the slurry has low solids-content. The slurry comprises a bicarbonate salt, which acts as a catalyst for increasing removal rates of dielectric films during polishing of these substrates. |
| priorityDate |
2005-01-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |