| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_38ed56a4b4e8e2315b2b3308bffedb3f |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02274
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02131
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76801
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76826
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02129
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76831
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76829
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76834
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-022
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3105
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31629
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02211 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-4763 |
| filingDate |
2004-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8a0448564b3edbd971dbab99b9f54ff8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aa972ad6e2c1a6ea3675d7b9fe587533
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_142c5d9ad481ae6c1ba0df9b24692a7f |
| publicationDate |
2006-06-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2006115996-A1 |
| titleOfInvention |
Method for enhancing FSG film stability |
| abstract |
A method for enhancing stability of a fluorinated silicon glass layer is disclosed. A fluorinated silicon glass layer provided on a substrate is subjected to a phosphorous-containing and hydrogen-containing gas such as phosphine (PH 3 ), for example. The gas forms reactive hydrogen species which removes fluorine radicals and reactive phosphorous species which forms a moisture-gettering and ion-gettering phosphorious oxide film the layer. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009104754-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7981483-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8192805-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2009042443-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101528383-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009087577-A1 |
| priorityDate |
2004-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |