| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6a2ed1c1e97500f76f912bf9ba831e11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9427abab13aaa151e8e945ede8268a41
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1a0a883b254de3e1ec05f377388ed089 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2201-0347
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24917
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-12882
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-244
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-00 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-143
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-146 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B15-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B15-20 |
| filingDate |
2005-08-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c3bd52d7049351bce46c31a72adafde7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_641ceb32723e9c77b746040c4e3ce716
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_25e6b0fa00835c39c64bad7ad91e9fa3 |
| publicationDate |
2006-03-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2006062978-A1 |
| titleOfInvention |
Film forming method, electronic device and electronic apparatus |
| abstract |
A film forming method for forming a thin film pattern on a substrate, comprising a) forming the pattern of a metal base layer on the substrate by vapor-phase deposition with a mask; and b) forming a second metal film on the pattern of the metal base layer by plating the substrate. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102017126590-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11183425-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018166611-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010261031-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11649539-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8764960-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10177285-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2257142-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017244036-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012021242-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012028071-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11566316-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10103332-B2 |
| priorityDate |
2004-09-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |