http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006051957-A1

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_be2daa84607761102f9a9a992ea821d0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8fb4c0aff7081cc3890ba2d4251623f6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_19fa1e758da9fc3a9395d1dec3e7f93e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3d4d4e98af171f40b2a3519926be49db
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9c3e88153a6ef0da48cc5eed859fac22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ffbbb93a7eca92083a43240df9ef9252
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f246daa82851ebb2db0ecaea4eed55d5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5d59dc404a0c2d83299eabb63ae10740
classificationCPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S438-926
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30608
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-423
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28114
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-82385
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-42376
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66545
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823828
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-8238
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-4763
filingDate 2004-09-07-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4dbc3af6641f556a5f562118dc3d49ce
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d224ce21d313a2f77f3ffaffb5d9c294
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0cb34ddc181da45f4cdf9952a07e2684
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b041a24c9d35507972db47c815c7ff8e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bf68e41240fa172b660da10476713944
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_94ebcc49c662543de980a524277cbcb7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_017a726360874249975c0efaf60dd0e8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8aac81f3305330d4dad221e2838b77f4
publicationDate 2006-03-09-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2006051957-A1
titleOfInvention Method for making a semiconductor device that includes a metal gate electrode
abstract A method for making a semiconductor device is described. That method comprises forming on a substrate a dielectric layer and a sacrificial structure that comprises a first layer and a second layer, such that the second layer is formed on the first layer and is wider than the first layer. After the sacrificial structure is removed to generate a trench, a metal gate electrode is formed within the trench.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/GB-2465133-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8252675-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102468145-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009206406-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8110877-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9437706-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2009032230-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10388576-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10998242-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2009032230-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011136313-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009057769-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013280900-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8021942-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101929185-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015021772-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-101803005-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8951855-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010155846-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102479692-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20130123158-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8264048-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101485975-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8952541-B2
priorityDate 2004-09-07-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6667246-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6420279-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003143809-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6255698-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003211684-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6531750-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2002197790-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003235943-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6410376-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003228744-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6770568-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6544906-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2002155665-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003032303-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6475874-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003045080-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2002187610-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6475841-B1
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23938
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID416641266
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID16217088
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419558592
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449693299
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID412550040
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9989226
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23995
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452908191
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453327643
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID150906
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458391437
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID448362446
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414004986
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID159434
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID159433
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452441329
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID158731258
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419593465
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID447945359
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23963
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451818717
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID161922877
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449266279
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453010884
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID26042
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458431511
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426223773
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID292779
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419558793
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457707770
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID61685
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5359268
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419491804
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID82899
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419523132
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID961
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453621816
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23956
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID166601
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID159374
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID104730
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14923
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559021
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID62157
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559568
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453284447
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23986
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID161827978
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID159419
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453357195
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23950
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453615033
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID935
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5461123
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457707785
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID454092735
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457765275
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6326954
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID784
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559477
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID62395
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID454232550
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450964499
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419520488
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID16217677
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559541
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23939
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452894838
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419577474
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15913
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID60966
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452498775
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID166703

Total number of triples: 151.