| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_572f2c522c37b460bcf8e22ce6cd6fc9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7423a364ec01b273a35da7a8a1692f0d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_45be77ba418897ba37912fafae566804
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4f18091ebb2dc2e6ab6709956b5495d1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5c62b7a0961fd0b08cacd1d85c9d958b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_57aaad87e758c523f5ebf7d650d307e5 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01P2002-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01P2002-72
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01P2004-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01P2004-64 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01F17-235
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1409
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y30-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01F17-235
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24D3-02 |
| filingDate |
2005-02-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e27de877b570049702014126d58ce1b4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3618c50b48e5fa84a7101595279fd891
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6a774b8b95efd63e862672231a41a7e6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0b35680e5c0a1ae3935da8353f83d483
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_013b624ad16adcca58996d8b4f969667
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c0c730bc16471dc23b479ddf558a49d6 |
| publicationDate |
2006-02-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2006032150-A1 |
| titleOfInvention |
Method for producing improved cerium oxide abrasive particles and compositions including such particles |
| abstract |
Provided are methods for manufacturing improved cerium oxide abrasives suitable for forming slurry compositions suitable for CMP processes. The cerium oxide abrasives are produced by the heat treatment of a mixture of a cerium precursor compound and an impurity metal compound under conditions that produce primary cerium oxide particles that are incorporated in larger secondary abrasive particles. The presence of the impurity metal and/or the incompletely oxidized cerium within the secondary abrasive particle tend to reduce its mechanical strength, thereby reducing the likelihood of damaging a substrate surface during a CMP process utilizing such abrasives. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006234509-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2008023858-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015072522-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8388710-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8372303-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7837888-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9469800-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2008013407-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103943557-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008236050-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7368388-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008113589-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010009539-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9206336-B2 |
| priorityDate |
2004-08-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |