http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006021972-A1

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_21d603e1d24ef28ae4f18576b5f3e89c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e9ad224544e94c1554a57434c5fc12aa
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e5e77d1d1c36252df9a94e986d8df252
classificationCPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30625
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31053
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C15-00
filingDate 2004-07-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ac4c50f217370ce8b5085e5a8a349f1e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5e9aea3dc33e46934a8f8a7f6f48358d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5767897ee1daa34e4b2fbc4c910ef5f4
publicationDate 2006-02-02-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2006021972-A1
titleOfInvention Compositions and methods for chemical mechanical polishing silicon dioxide and silicon nitride
abstract The present invention provides an aqueous composition useful for polishing silica and silicon nitride on a semiconductor wafer comprising by weight percent 0.01 to 5 carboxylic acid polymer, 0.02 to 6 abrasive, 0.01 to 10 polyvinylpyrrolidone, 0 to 5 cationic compound, 0 to 5 zwitterionic compound and balance water, wherein the polyvinylpyrrolidone has a average molecular weight between 100 grams/mole to 1,000,000 grams/mole.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010210109-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8900335-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10508222-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105229110-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105229110-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7867909-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007007246-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8721909-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007007248-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007218811-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2014189684-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007045234-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009137123-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2013138558-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/GB-2443286-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008051010-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/GB-2443286-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I573864-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10584266-B2
priorityDate 2004-07-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6559056-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5772780-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6423125-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5938505-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4588421-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2002045350-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5770103-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6132637-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5139571-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5891205-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5876490-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005050803-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6299795-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6042741-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004108302-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6312487-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2002042208-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5769689-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003007920-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6218305-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6379406-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4462188-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6410444-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6540935-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6221219-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6046112-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6420269-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5011671-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2002069593-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6436834-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2002111024-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2001037821-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5614444-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6435948-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6343976-B1
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128664139
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129359585
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226394040
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419549336
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID422032241
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415755888
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226405653
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23676152
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID75110
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129741161
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128662840
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419522015
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID142384498
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419523291
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID408867130
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID425193155
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21115350
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453010884
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128889484
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226467080
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226413358
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451128520
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127602502
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457707758
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559532
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226405424
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5256658
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7521
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226409954
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID977
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID1117
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID66077
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID947
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421127682
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226413464
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450664886
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226406399
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID243
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226394128
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226406400
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID227402469
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID962
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID783
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID159433
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID32743
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128972812
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID159434
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID136121905
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID16773
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID248
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24261
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2752991
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128378310
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426285897
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID59952720
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415928367
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID247
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID159765309
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID17881685
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6958
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419525060
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5413
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226571559
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7929
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127400166
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9086
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3084099
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID123279
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419517738
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21226398
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6131
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24404
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415733170
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512635
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9942130
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127976140
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128801696
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559256
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID296854
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID412584818
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID412527784
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID142372688
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15471898
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128363854
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419556970
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452908191
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6339
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226420543
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226559320
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6509
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458397365

Total number of triples: 165.