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filingDate 2004-06-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_69f76c78d98305d5be522123baee3352
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publicationDate 2005-12-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2005287826-A1
titleOfInvention Method of sealing low-k dielectrics and devices made thereby
abstract Methods for sealing porous low-k dielectrics, and devices made thereby, are described, comprising treating the porous low-k dielectrics by atomic layer deposition so as to seal the pores. ALD reactants are chosen in part based on their size, such that they do not deeply penetrate the interconnected pore structures of the dielectrics.
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