| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_95d027ded3fc8f66079511a6cf314e51
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5e7529b84dbb1f1d8e44b46de3379f1b |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-414
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02631
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02565 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-363 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01K7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-414 |
| filingDate |
2004-06-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f41821ee66eb7f7b145a5705d0a0f202
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7713f52ea1c3c310de469b3bf9bece71 |
| publicationDate |
2005-10-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2005221594-A1 |
| titleOfInvention |
ISFET with TiO2 sensing film |
| abstract |
A method of manufacturing a titanium dioxide (TiO 2 ) thin film, used as the sensing film of the ISFET, prepared on the gate oxide by sputtering deposition. It also utilizes current/voltage measuring system to measure the current-voltage curves for the different pH values and temperatures. From the relationship of the current-voltage curves and temperatures, the temperature parameter of the TiO 2 gate pH-ISFET can be calculated. In addition, it also uses a constant voltage/current circuit and a voltage-time recorder to measure the output voltage of the TiO 2 gate pH-ISFET, the drift rates for the different pH values and hysteresis for different pH loops are calculated. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11099152-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10473616-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9080969-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9709525-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021199619-A1 |
| priorityDate |
2004-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |