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filingDate 2005-01-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2005-10-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2005221004-A1
titleOfInvention Vapor reactant source system with choked-flow elements
abstract A source system for introducing gaseous source chemicals to a reaction space is provided. The source system comprises an inactive gas source, a pressure controller, a reactant supply source, a gas flow control valve and a choked-flow element.
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