http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005199589-A1

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fdad00677b9268c26e005a9e03a7b9dd
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F3-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-7684
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-321
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F3-06
filingDate 2005-04-20-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ba8730f0993ddf1f975e1a362b332d78
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6709afbafd4f6483486bb9c4c6168b61
publicationDate 2005-09-15-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2005199589-A1
titleOfInvention Copper-based metal polishing solution and method for manufacturing semiconductor device
abstract Disclosed is a copper-based metal polishing solution which hardly dissolves a Cu film or a Cu alloy film when the film is dipped into the solution, and has a dissolution velocity during polishing several times higher than that during dipping. This copper-based metal polishing solution contains at least one acid selected from aminoacetic acid and aminosulfuric acid, an oxidizer, and water.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8845915-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7086935-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8889555-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8859429-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104245230-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006111024-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102703027-A
priorityDate 1993-12-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-RE37786-E
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5334712-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4954142-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6046110-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-3779842-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6426294-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4086176-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4859281-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4956313-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5575885-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6861010-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5225034-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4349411-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6521574-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5770095-A
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419526493
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID239490608
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID962
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID409381142
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419537453
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453001630
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5987
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID236070653
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21903993
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512635
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID418354341
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID750
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7047
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID229027386
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID25000
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID70451296
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5150145
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23978
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID61739
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226395130

Total number of triples: 61.