patent/US-2005190450-A1

http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005190450-A1

Outgoing Links

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filingDate	2005-01-24-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor	http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fa248eba32cbf68373a408bb6e7ecfd3 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_16486b2d3d231f60b6a2ab509911c93a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e7935ecb6af31b3ea501079dd3ed043d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_abab45255a996239b7f056ddef95fb35 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bec322cb7c6ed77005444ef9eb2908d6 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_89e1bcac5ad1d3a740b735cc19728c09 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b9113053557e8df9d800bf3b570eafd9
publicationDate	2005-09-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber	US-2005190450-A1
titleOfInvention	Ultra high transmission phase shift mask blanks
abstract	The present invention relates to phase shift mask blanks for exposure wavelength of less than 300 nm, a process for their preparation, to phase shift masks manufactured by such phase shift mask blanks and a process for the preparation of said phase shift masks.
isCitedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9664626-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9458536-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11066745-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10016338-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10363370-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011111332-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11684546-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8512796-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9863042-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2007039161-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007212618-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9554968-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11406765-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10577154-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008145771-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9764093-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9545360-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11624115-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10189603-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108319104-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9937099-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010261099-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010261101-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11344473-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011104593-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010261100-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7989124-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11086211-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11226549-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9572526-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006249697-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007243491-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9878101-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8012654-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7368729-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11148856-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9272095-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11298293-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10390744-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7095021-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10481485-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8834954-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8329364-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10201660-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9005851-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004256555-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11116695-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9903782-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008215890-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8003284-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7767367-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10537273-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7767366-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10537494-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11123491-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7790339-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1832925-A3 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10912714-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11077233-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7897299-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11724860-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9662450-B2
priorityDate	2004-01-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type	http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

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isCitedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003118920-A1
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Total number of triples: 97.