Predicate |
Object |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-518 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28088 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-517 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28079 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28194 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823842 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-18 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8238 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-51 |
filingDate |
2005-02-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f7c82d33df160a9555d0a566c7788bb6 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d1dbc5b651fecc78e9f9cf158c627035 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_354a66a99d8914ae543439a5fc8e8728 |
publicationDate |
2005-07-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
US-2005158974-A1 |
titleOfInvention |
Method for making a semiconductor device having a metal gate electrode |
abstract |
A method for making a semiconductor device is described. That method comprises forming a dielectric layer on a substrate, and forming an impurity containing metal layer on the dielectric layer. A metal gate electrode is then formed from the impurity containing metal layer. Also described is a semiconductor device that comprises a metal gate electrode that is formed on a dielectric layer, which is formed on a substrate. The metal gate electrode includes a sufficient amount of an impurity to shift the workfunction of the metal gate electrode by at least about 0.1 eV. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8785272-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7611943-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8581352-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7087480-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1974372-A4 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1974372-A2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006008968-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9202686-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006246698-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7332433-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007173008-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8012824-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006084247-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101144436-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7425497-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2007087127-A3 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7157378-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007063296-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7750418-B2 |
priorityDate |
2003-05-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |