http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005148182-A1

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c3a2f00e72ba6e4c09b6da573427fbed
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F3-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-321
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-311
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-4763
filingDate 2005-02-15-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_26b106bab26259be9d861e7313ecc159
publicationDate 2005-07-07-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2005148182-A1
titleOfInvention Compositions for planarization of metal-containing surfaces using halogens and halide salts
abstract A planarization method includes providing a metal-containing surface (preferably, a Group VIII metal-containing surface, and more preferably a platinum-containing surface) and positioning it for contact with a polishing surface in the presence of a planarization composition that includes a halogen and a halide salt.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006261040-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-100425667-C
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003119316-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003119321-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7244678-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005159086-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7049237-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006183334-A1
priorityDate 2001-12-21-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4035500-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2002111027-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5318927-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5254217-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2002008265-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6278153-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6149828-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6261157-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6756308-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2002081853-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6039633-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4297436-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6641631-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7049237-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2002017063-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6861353-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6454957-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5958794-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5695384-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6379406-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6537462-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2002004360-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5378492-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6451214-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5692950-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5954997-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6395194-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6069080-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2001006031-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5575885-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003119426-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6589100-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6840971-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5380401-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006261040-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6211034-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6346741-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2001023701-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6884723-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7121926-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6143192-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5916855-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2002039839-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5888906-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4747907-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6315803-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6015506-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6527818-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2002042208-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6527622-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5981454-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4670306-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2002050322-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5527423-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6841479-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6730592-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6306012-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006183334-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6177026-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006194518-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003119321-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6290736-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003119316-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5989988-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6509273-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003119304-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003121891-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5700383-A
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226647550
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID87089983
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6131
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID16773
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226406400
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226406399

Total number of triples: 105.