http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005147916-A1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0382 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 |
| filingDate | 2003-12-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_85de35500c23de6fd58a05710304ff95 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5db87ccedbbd5210ef735a69b767cf50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_982c205eb01a067f7ee244db2d04bbf2 |
| publicationDate | 2005-07-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-2005147916-A1 |
| titleOfInvention | Low outgassing and non-crosslinking series of polymers for EUV negative tone photoresists |
| abstract | A series structure of a chemically amplified negative tone photoresist that is not based on cross-linking chemistry is herein described. The photoresist may comprise: a first aromatic structure copolymerized with a cycloolefin, wherein the cycloolefin is functionalized with a di-ol. The photoresist may also include a photo acid generator (PAG). When at least a portion of the negative tone photoresist is exposed to light (EUV or UV radiation), the PAG releases an acid, which reacts with the functionalized di-ol to rearrange into a ketone or aldehyde. Then new ketone or aldehyde is less soluble in developer solution, resulting in a negative tone photoresist. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006154152-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006068322-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7147986-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005221219-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7410747-B2 |
| priorityDate | 2003-12-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 70.