Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_73ebc284a55d5daf0e209d6186c9e65c |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2201-09781 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-4679 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2201-09918 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-125 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-4664 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2203-013 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-0008 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K1-0269 |
classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-46 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B5-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D7-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D5-12 |
filingDate |
2004-08-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2c88c84cdaf689634e76bc23f9f7f1b0 |
publicationDate |
2005-05-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
US-2005106775-A1 |
titleOfInvention |
Pattern forming method, film structure, electro-optical apparatus, and electronic device |
abstract |
Exemplary embodiments of the present invention provide a pattern forming method that secures sufficient alignment accuracy when a pattern is formed by droplet ejection. Exemplary embodiments provide a pattern on a substrate by placing a liquid material including a pattern forming material onto the substrate by droplet ejection, including placement of the liquid material including an alignment mark forming material, onto the substrate by the droplet ejection prior to forming the pattern; and placement of the pattern forming material by making use of a placed alignment mark. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012214017-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9603257-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7608537-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021104411-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013220680-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008081466-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007099396-A1 |
priorityDate |
2003-09-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |