| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c371196d5b8e521844e21252617b0958
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d84ed66886a2bd80e23b3326f9c21ecc |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2221-1036
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2221-1047 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3105
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-7682
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76826
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76801 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3105
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 |
| filingDate |
2003-06-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bc7c1e46d2cb2bcf2dd63796a0342737
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_77164d7ca1501978bd3acd5b3d012b1f |
| publicationDate |
2004-12-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2004266184-A1 |
| titleOfInvention |
Post-deposition modification of interlayer dielectrics |
| abstract |
A method for modifying an interlayer dielectric (ILD) is disclosed. In one embodiment, an ILD is formed having metallization therein, which may have a protective layer. The ILD is then exposed to a first solution comprising a F − ion, either aqueous with a co-solvent or an organic-HF in conjunction with an organic solvent in supercritical carbon dioxide. After exposing the ILD to the first solution, the ILD is exposed to a second solution comprising a silane in supercritical carbon dioxide. In another embodiment, the ILD is exposed to the first solution after a damascene process including a chemical mechanical polishing is performed on the ILD. In a further embodiment, the ILD can be polymerized to create an organic polymer network after the ILD has been exposed to the second solution. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7545045-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110215902-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9449872-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006214298-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008000875-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104795358-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7422020-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8404315-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009181187-A1 |
| priorityDate |
2003-06-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |