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filingDate 2004-01-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fe94237957ae9596189810c95903675d
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publicationDate 2004-11-25-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2004235242-A1
titleOfInvention Methods of forming capacitor constructions
abstract The invention includes capacitor constructions comprising a layer of aluminum oxide between a high-k dielectric material and a layer comprising titanium and nitrogen. The layer comprising titanium and nitrogen can be, for example, titanium nitride and/or boron-doped titanium nitride. The capacitor constructions can be incorporated into DRAM cells, which in turn can be incorporated into electronic systems. The invention also includes methods of forming capacitor constructions.
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