| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31691
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-55
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02271
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02194
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02197
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02186
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-409 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316 |
| filingDate |
2001-08-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fe94237957ae9596189810c95903675d |
| publicationDate |
2003-03-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2003045006-A1 |
| titleOfInvention |
Capacitor constructions comprising perovskite-type dielectric materials, and methods of forming capacitor constructions comprising perovskite-type dielectric materials |
| abstract |
The invention includes a capacitor construction. A capacitor electrode has a perovskite-type dielectric material thereover. The perovskite-type dielectric material has an edge region proximate the electrode, and a portion further from the electrode than the edge region. The portion has a different amount of crystallinity than the edge region. The invention also includes a method of forming a capacitor construction. A capacitor electrode is provided, and a perovskite-type dielectric material is chemical vapor deposited over the first capacitor electrode. The depositing includes flowing at least one metal organic precursor into a reaction chamber and forming a component of the perovskite-type dielectric material from the precursor. The precursor is exposed to different oxidizing conditions during formation of the perovskite-type dielectric material so that a first region of the dielectric material has more amorphous character than a second region of the dielectric material. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006006450-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7033884-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004241322-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005186688-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7052584-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007001206-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7092234-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7488514-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6838122-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7208198-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005208219-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6982103-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2019079062-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6884475-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005133127-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004235242-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7217617-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004233610-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11773480-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004185177-A1 |
| priorityDate |
2001-08-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |