| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6835
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67103
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67109
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6875
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05B3-143
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05B3-265
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05B3-283 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B3-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B3-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B3-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-687
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-68 |
| filingDate |
2000-12-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0a141a9867a232dcc748117818e055c1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_715a3c8c23494b886c79ad08d1120949 |
| publicationDate |
2004-10-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2004211767-A1 |
| titleOfInvention |
Ceramic heater and support pin |
| abstract |
The present invention provides a ceramic heater which makes it possible to make the distance between a semiconductor wafer and the heating surface of a ceramic substrate constant at any time, heat the semiconductor wafer at an even temperature and prevent contamination of the semiconductor wafer, and which does not cause dropping-out of a supporting pin. The ceramic heater of the present invention comprises a ceramic substrate on a surface of which or inside which a heating element is formed, wherein the ceramic heater is constituted to have a structure that an object to be heated can be held apart from a surface of said ceramic substrate and heated. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010154203-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007257022-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7500781-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7696455-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8242416-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I650829-B |
| priorityDate |
1999-12-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |