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filingDate 2004-02-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2004-10-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2004203255-A1
titleOfInvention Method of forming Si-containing thin film
abstract The method of forming a Si-containing thin film forms a film using an organic Si-containing compound having a Si—Si bond represented by the following formula (I): n n n wherein R 1 represents a hydrogen or a methyl group, and R 2 represents a methyl group, an ethyl group, a propyl group or a tertiary butyl group.
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