http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004188713-A1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2221-1031 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02216 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02282 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3122 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-7681 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76808 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76802 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-0336 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 |
| filingDate | 2003-01-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_25a35c1ad5c7c28153f7424d5a93a5aa http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_44e67fce0543b579ff8be7a333e8adb8 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bd6f717ec2abab6b6d04edae0344f41a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_54357574756fd20b3f19a044978ab278 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_964f976fd734d7b4268a1b53795f59c2 |
| publicationDate | 2004-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-2004188713-A1 |
| titleOfInvention | Poly(organosiloxane) materials and methods for hybrid organic-inorganic dielectrics for integrated circuit applications |
| abstract | A method for making an integrated circuit is disclosed as comprising depositing alternating regions of electrically conductive and dielectric materials on a substrate, wherein an area of dielectric material is formed by: a silane precursor having a fully or partially fluorinated first organic group comprising an unsaturated carbon-carbon double bond, the fully or partially fluorinated organic group bound to silicon in the silane precursor; forming from the silane precursor a hybrid organic-inorganic material having a molecular weight of at least 500 on a substrate; and increasing the molecular weight of the hybrid material by exposure to heat, electromagnetic radiation or electron beam so as to break the unsaturated carbon-carbon double bond and cross link via the fully or partially fluorinated organic group. Also disclosed is a method for making an integrated circuit is disclosed as comprising: reacting a compound of the general formula X3MOR3 3 , where X3 is a halogen, M is silicon, and OR3 is alkoxy; with a compound of the general formula R1M1; where R1 is selected from alkyl, alkenyl, aryl and alkynyl and wherein R1 is partially or n n n fully fluorinated; and M1 is an element from group I of the periodic table; so as to form a compound of the general formula R1MOR3 3 ; hydrolyzing and condensing R1MOR3 3 so as to form a hybrid organic-inorganic material with a molecular weight of at least 500; depositing the hybrid organic-inorganic material on a substrate as an insulator in an integrated circuit; depositing, before or after depositing the hybrid material, an electrically conductive material within the integrated circuit. Also disclosed is a method for making an integrated circuit comprising forming alternating areas of electrically conductive and dielectric materials, the dielectric materials formed by hydrolysing, partially or fully, one or more precursors, at least one of which having the formula (I): where R2 is a halogen, —OH, or alkoxy group, where M1 and M2 are independently a metal or metalloid, and where R1 is a fully or partially fluorinated alkyl group having from 1 to 10 carbon atoms or a fully or partially fluorinated aromatic group. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I788295-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I692546-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010260940-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016260916-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007251551-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019122883-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10790135-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105706222-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105461744-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105461744-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105418926-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7129167-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10297773-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009184090-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019229283-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11309503-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2008052103-A1 |
| priorityDate | 2002-01-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 524.