http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004149718-A1

Outgoing Links

Predicate Object
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67109
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67103
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05B3-265
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B3-26
filingDate 2001-04-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_715a3c8c23494b886c79ad08d1120949
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8762d7a5b344c366359df44eb9d44297
publicationDate 2004-08-05-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2004149718-A1
titleOfInvention Ceramic heater
abstract An object of the present invention is to provide a ceramic heater making it possible to make the temperature of a face for heating a silicon wafer even and prevent damage of the silicon wafer. The ceramic heater of the present invention is a ceramic heater comprising resistance heating elements formed on a surface of a ceramic substrate in a disc form or inside the ceramic substrate, wherein the resistance heating elements composed of two or more circuits being divided in the circumferential direction are arranged in the outermost periphery of the ceramic substrate and further the resistance heating element composed of a different circuit is formed in the inner portion of the resistance heating elements being arranged in the peripheral portion.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006096972-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005016987-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11751693-B2
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-112007000835-B4
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priorityDate 2000-04-07-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6133557-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4057707-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6080970-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5118983-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003015521-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6465763-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6475606-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6677557-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6710307-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2002043527-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6507006-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5616024-A
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID159433
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452908191
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID454511054
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID159434
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559541
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5461123
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23675242
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559550
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14775
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419579069
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450542361
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24586
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453010884

Total number of triples: 73.