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filingDate 2003-12-05-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2004-06-24-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2004118345-A1
titleOfInvention Flexibly suspended gas distribution manifold for plasma chamber
abstract A gas inlet manifold for a plasma chamber having a perforated gas distribution plate suspended by flexible side walls. The flexible suspension minimizes mechanical stress due to thermal expansion of the gas distribution plate. In another aspect, the suspension provides thermal isolation between the gas distribution plate and other components of the chamber.
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