| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-78 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32055 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-78 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate |
2003-11-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e7720c8e1e963d7cc617c5e1879612de
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4686613ad1a7702ec861a880cd005db1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e616715d5df2c9771d2f87cbc97f8399
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b6c066bcdc4d7dfabe2b4682d22fde10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7f9a04e08c4aa373703548d3fe98c787 |
| publicationDate |
2004-05-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2004089632-A1 |
| titleOfInvention |
Method for etching an object using a plasma and an object etched by a plasma |
| abstract |
Disclosed herein is a method for etching a face of an object and more particularly a method for etching a rear face of a silicon substrate. The object having a silicon face is positioned so as to be spaced apart from a plasma-generating member by a predetermined interval distance. The plasma-generating member generates arc plasmas to form a plasma region. A reaction gas is allowed to pass through the plasma region to generate radicals having high energies and high densities. The radicals react with the object to etch the face of the object. The face of the object can be rapidly and uniformly etched. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008017316-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8075790-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008011332-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013220546-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7365019-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008190558-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008185017-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7259105-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2009046472-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011073563-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005142783-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006076316-A1 |
| priorityDate |
2002-11-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |