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filingDate 2003-07-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_42188412d11a11a6ff7c07b39b899b70
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publicationDate 2004-04-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2004077295-A1
titleOfInvention Process for reducing dishing and erosion during chemical mechanical planarization
abstract This invention is directed to a slurry system and process of metal removal from a substrate. This invention is useful for polishing a microelectronic device. This invention is especially useful for chemical mechanical planarization of a semiconductor wafer. The slurry system of the present invention includes a first slurry and a second slurry, wherein the first slurry has a higher abrasive concentration than the second slurry. The process of the present invention includes a first polish with the first slurry to partially remove metal from the substrate, and a second polish with the second slurry to further remove metal from the substrate.
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