http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101126124-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1454 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30625 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 |
| filingDate | 2005-05-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2012-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2012-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101126124-B1 |
| titleOfInvention | Cerium Oxide Slurry Composition with Improved Polishing Flatness |
| abstract | Particularly useful for Chemical Mechanical Polishing (CMP) processes of the Shallow Trench Isolation (STI) process to form a semiconductor multilayer structure, improving dishing uniformity on silicon wafers to prevent dishing and erosion. A reducing chemical mechanical polishing slurry composition is disclosed. The slurry composition includes a cerium oxide abrasive, a polycarboxylic acid having a weight average molecular weight of 50,000 to 500,000 or a salt thereof, an alcohol compound, and water, and the content of the cerium oxide abrasive is 0.1 to 20% by weight based on the total slurry composition. The content of the polycarboxylic acid or its salt is 0.01 to 20% by weight, the content of the alcohol compound is 0.001 to 10% by weight. In addition, the pH of the slurry composition is preferably 5 to 10.n n n n Chemical mechanical polishing, STI process, slurry, dishing, erosion, polishing selectivity, polycarboxylic acids and salts thereof, alcohol compounds |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2014011678-A1 |
| priorityDate | 2005-05-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 41.